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iReticles
A key to decreasing semiconductor manufacturing costs and improving yields is to keep critical equipment running at peak efficiency at all times. As steppers are typically a bottleneck resource in the fab, the challenge is to eliminate any idle time for this expensive equipment and to reduce misprocessing. An often overlooked means of overcoming idle time and eliminating errors when processing wafers at steppers is automated reticle management.
As technology advances, the average life of a reticle becomes shorter and the cost of each reticle per wafer increases, requiring better management of this expensive resource.
Increase Equipment Utilization
iReticlesTM from Brooks Automation is a system for managing and tracking the large number of reticles that exists in a typical fab. The growing number of reticles in a fab makes it increasingly difficult to locate and transport reticles to the right equipment at the right time. iReticles eliminates delays associated with locating reticles by doing the job in just seconds. When integrated with a material control system (MCS), iReticles can dispatch the right reticle to be delivered to the correct stepper at exactly the right time.
Eliminate Misprocessing
iReticles eliminates misprocessing by tracking exactly where each reticle is at any given moment. When integrated with the manufacturing execution system (MES), iReticles eliminates errors resulting from manually selecting the wrong reticle. iReticles accurately manages cleaning and inspection cycles for each reticle using dynamically configurable usage counters. This ensures the use of inspected and clean reticles at every step, thus improving yields.
Key Benefits
Eliminate Misprocessing Due to Reticle Handling Errors
Automatic identification and verification.
Automatic location, reservation, and transportation of correct reticles.
Automatic verification of reticle specification using real-time CD data. |
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